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Título del libro: Program And Abstract Book - 2010 7th International Conference On Electrical Engineering, Computing Science And Automatic Control, Cce 2010
Título del capítulo: Heat capacity determination of metallic thin films using temperature profiles at room conditions: Theory

Autores UNAM:
HECTOR GERARDO RIVEROS ROTGE;
Autores externos:

Idioma:
Inglés
Año de publicación:
2010
Palabras clave:

Analytical model; Copper films; Film-substrate systems; Heat capacities; Key parameters; Metallic thin films; Temperature profiles; Theoretical result; Thermal properties; Time constants; Automation; Calorimetry; Control; Electrical engineering; Mathematical models; Polyimides; Process control; Specific heat; Substrates; Temperature control


Resumen:

An analytical model for heat capacity determination based on energy conservation to obtain the heating/cooling temperature profiles of a film-substrate system is discussed. The proposed model integrates the heat transfer by convection and radiation on films to obtain the temperature profiles such that thermal properties can be obtained from these profiles at room conditions. We demonstrated that the resulting time constants of the analysis are the key parameters to obtain experimentally some thermal properties of the film/substrate system. The methodology and the theoretical results to estimate the heat capacity of gold (100 nm) on Kapton (0.125 mm) and on glass (0.5 mm) substrates are analyzed and reported. Simulations with experimental results reported for copper films by this methodology are in good agreement with our results. © 2010 IEEE.


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