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Título del libro: Ultraviolet Self-Diffraction Effects Exhibited By Ion-Implanted Au Nanoparticles In Silica
Título del capítulo: Plasma emission spectroscopy related to the optical properties of silicon oxynitride films for inhomogeneous filters

Autores UNAM:
RAMON RODRIGUEZ LOPEZ; NOEMI ABUNDIZ CISNEROS; ROBERTO SANGINES DE CASTRO; JUAN AGUILA MUÑOZ; ROBERTO MACHORRO MEJIA;
Autores externos:

Idioma:
Inglés
Año de publicación:
2022
Palabras clave:

Optical emission spectroscopy; Principal component analysis; Silicon nitride; Optical-; Plasma emission spectroscopy; Plasma spectroscopy; Principal-component analysis; Reactive magnetron sputtering; Silicon oxynitride films; Synthesised; Optical properties


Resumen:

The optical plasma spectroscopy was correlated with the optical properties of SiNxOy synthesized by reactive magnetron sputtering. A principal component analysis of the system data was developed to monitor the synthesis of inhomogeneous filters. © 2022 TheAuthor(s)


Entidades citadas de la UNAM: